Description
The confocal chromatic confocalDT measuring system is used for fast distance and thickness measurement. Different sensor models and controller interfaces open versatile fields of application, e.g. in the semiconductor industry, glass industry, medical engineering and plastics production.
Spesification
| Sensor model (miniature) | IFS2402-0,4 | IFS2402-1,5 I | IFS2402/90-1,5 | IFS2402-4 I | IFS2402/90-4 | IFS2402-10 | IFS2402/90-10 |
| Measuring range | 400µm | 1.5mm | 1.5mm | 3.5mm | 2.5mm | 6.5mm | 6.5mm |
| Start of measuring range approx. | 1.5mm | 0.9mm | 2.5mm 1) | 1.9mm | 2.5mm 1) | 2.5mm | 3.5mm |
| Spot diameter | 10µm | 20µm | 20µm | 20µm | 20µm | 100µm | 100µm |
| Linearity |
~0.3µm | 1.2µm | 1.2µm | ~3µm | 2µm | 13µm | 13µm |
| ≤±0.08 % FSO | ≤±0.2 % FSO | ||||||
| Resolution 2) | 16nm | 60nm | 60nm | 0.1µm | 0.1µm | 0.25µm | 0.25µm |
| Weight | 15g | ||||||
| Max. tilt (direct reflection) | ± 8° | ± 5° | ± 5° | ± 3° | ± 3° | ± 1.5° | ± 1.5° |
| Protection class | IP40 | ||||||
| Operating temperature | +5 ... +70 °C | ||||||
| Storage temperature | -30 ... +70 °C | ||||||
| Sensor cable (optical fiber) | length: integral cable 2m; option up to 50m; bending radius: static 30mm; dynamic 40mm | ||||||
| Shock | 15g, 6ms | ||||||
| Vibration | 2g / 10Hz ... 500Hz | ||||||
